Yttrium-doped zirconia (YSZ) single crystal substrate is one of the earliest materials used in high temperature superconducting thin films. Generally used zirconia needs to be doped with yttrium as a stabilizer, the common concentration of 13 mol%, YSZ is characterized by good mechanical and chemical stability and low cost, it has been widely used in ceramics, refractories, machinery, electronics, optics, aerospace, biology, chemistry and so on.
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