YAG(Ce) is a non-hygroscopic, chemically inert inorganic scintillator, the wavelength of maximum emission at 550 nm is well matched to CCD sensitivity, and it has reasonably fast scintillator(70 ns decay time) with a relatively high light yield of 40% of NaI(TI) scintillator. YAG(ce) can be used in the harsh environment to detect alpha, gamma rays due to its stable physical and mechanical property, especially for electron microscopy applications.